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Abstract
In this thesis, we introduce a new optical
device, which is the integrated optical polarizer. It is
based on the Silicon Hollow Waveguide. This choice
is made to make the device fabrication compatible
with MEMS process. We use the Photonic Crystals
structures to achieve the required polarizer high
extinction ratio. 2 types of polarizers are being
introduced and analyzed. The first one is a 1D
photonic crystal or multilayer polarizer. The
advantage of this device is the relative simplicity of
fabrication, as the multilayers are made of alternating
layers of Air and Silicon. The extinction ratio (XR) in
this case is reasonable. In order to increase this
ratio, we will use the 2D photonic crystals, which
achieves the desired very high XR. But this is done
on the expense of the increased complexity of the
device, and became more subject to process
tolerance and variation. To model the effects of
process randomness on the performance, a
statistical analysis tool is developed based on Monte
Carlo Simulation. For demonstration, the tool is
applied on a typical device of the optical networks,
which is the 2x2 switch, and we managed to optimize
the design to enhance the yield, through analyzing
the tool data.