الفهرس 
ABSTRACTOnly 14 pages are availabe for public view
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Abstract
This thesis contains an over view about IvlEMS and Microsystems, Describes the Microsystems fabrication processes used in lC fabrication (Photolithography ,Etching, Thermal oxidation, Diffusion, Ion implantation ,Annealing ,Evaporation, Physical vapor deposition (Sputtering), Chemical vapor deposition, and Epitaxy), Includes The application of fabrication techniques in the manufacturing MEMS (Bulk micromachining ,Surface micro machining , And high-aspect-ratio micromachining), Attention is focused on automotive sensors, four types of temperature sensors [RTD (Resistive temperature detector) , Silicon spr-eading resistance Temperature Sensor, NTC & PTC thermistors and Silicon diodes as thermal microsensors], The two types of accelerometer [Piezoresistive accelerometers and Capacitive accelerometers], Two types of pressure sensors [Piezoresistive pressure sensors and Capacitive pressure sensors] , are described ,Their technology, Fabrications and their importance in automotive field and finally talk about the future work in MEMS auto motive sensors.