الفهرس 
Introduction and MEMS MaterialsOnly 14 pages are availabe for public view
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Abstract
Operating voltage, pressure and flow rate of micropumps are critical issues to analyze the performance and suitability of micropumps for certain medical applications. A schematic illustration of operating voltages and flow rates of mechanical micropumps is shown in Figure 4.23. Piezoelectric and electromagnetic mechanical micropumps have been reported extensively for microfluidic systems among the mechanical micropumps. The major limitation related to these types of micropumps is very high operating voltage. Electrostatic micropump is easy to fabricate on integrated microfluidic systems but it also requires high operating voltage. The ICPF micropump has an adequate flow rate at a relatively low operating voltage but with complex geometry.