الفهرس 
Fourier Transform SpectroscopyOnly 14 pages are availabe for public view
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Abstract
A novel miniature Mach-Zehnder (MZ) interferometer is
proposed. The micro-machined MZ interferometer is fabricated on an
SOI wafer using Deep Reactive Ion Etching (DRIE) technology. The new
structure is based on the use of two Si/Air beam splitters, and two
metallic mirrors fabricated monolithically in a small footprint measuring
1 mm x 2 mm on the die. By moving the mirrors using an integrated
comb drive MEMS actuator, the structure is tested to perform the
function of a Fourier Transform Infrared (FT-IR) spectrometer, where
two wavelengths 1550 nm and 1575 nm have been successfully identified
showing a spectral resolution of 25 nm. White Source measurements
have been also done on the MZ spectrometer; however, the results were
affected by the dispersion in silicon. A solution for such dispersion
problem is proposed and presented in this thesis.
The successful implementation of this four element interferometer
in an integrated form opens the door for the development of more
complex optical structures that are self aligned and fabricated in a one
step lithography process.