الفهرس يوجد فقط 14 صفحة متاحة للعرض العام
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المستخلص
Microelectromechanical system (MEMS) technology has shown its bright future in many different fields, especially in space, RF systems and BME. MEMS are small mechanical devices of dimensions from a few im to a few mm, fabricated by microelectronics manufacturing techniques. By using MEMS technology, one can greatly shrink the cost and the footprint of RF circuits, since all the off-chip components such as inductors; capacitors; and resistors can be fabricated and integrated into a whole single chip at one time.
MEMS technology has also received the attention of the wireless industry because
of its advantages such as low cost, low power, higher performance, reduced size and weight, and increased reliability.
A commonly used principle to drive MEMS devices is electrostatic actuation. It is based on the electrostatic force between plates with a potential difference. However, this thesis declares and emphasis the effect of electric field lines of force and not the potential difference between them.
At the beginning, this thesis includes proposed empirical model for fringing field capacitance then describes the principle of electrostatic force (ESF) produced from electric field lines of force between a two parallel- plate actuator of different configurations and introduces a modified form for the ESF equation in the case of uncentralized plates.
At the end, this thesis describes an analytical model of a two parallel-plate tunable capacitor actuator with a co-centralized unequal-length plates and proposed a distribution for the electric field lines of force (EFLOF).